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*  Travel ranges to 100 μm × 100 μm in X, Y and to 10 μm in Z
*  Resolution to 0.1 nm due to capacitive sensors
*  High velocity versions with direct drive
*  Vacuum-compatible and nonmagnetic versions on request
*  Parallel kinematics for highe accuracy and dynamics
*  Parallel metrology for active compensation of guiding errors
*   Zero-play, high-precision flexure guide system
*  Clear aperture 50 mm × 50 mm for transmitted-light applications